In this paper , we brought forward an innovative idea : according to the characteristics of easy deformation of ultra - thin mirror , we employ a sphere mirror , which is easier to fabricate and test , to replace the aspherical mirror , then the sphere mirror is deformed into an aspherical one by active optics technology . on this purpose , we need to study the mechanism and method of shaping a spherical mirror into an aspherical one 由于非球面鏡的加工和檢測都比較困難,因此本文提出了一個大膽的設(shè)想:利用超薄鏡易于變形的特點(diǎn),以加工和檢測難度遠(yuǎn)低于非球面的球面來代替非球面,運(yùn)用鏡面的主動控制技術(shù)將球面反射鏡變形成所需精度的非球面反射鏡。
The projection optics with aspherical mirror of sub - nanometer accuracy are required to get a resolution of less than 0 . 1 m m and wide exposure area simultaneously . the precision of polishing and testing for such ashperical surface is fairly high and it has not been achieved yet in our current state Euvl微縮投影物鏡為了同時實(shí)現(xiàn)大的曝光視場和0 . 1 m以下的成像分辨率,微縮投影光學(xué)系統(tǒng)需采用面形精度達(dá)亞納米量級的非球面,但我們現(xiàn)階段的光學(xué)加工和檢測技術(shù)距此要求尚有一定的差距。